| 摘要 |
PURPOSE:To easily manufacture a target made of sintered compact or rare-earth alloy free from defects and having high density by refining an alloy having a specific composition consisting of rare earth elements, Fe and Co, crushing the above, charging the resulting powdered alloy into a mold for compacting and then subjecting it to compacting and sintering under specific conditions. CONSTITUTION:The prescribed alloy is refined previously so as to provide a composition consisting of 10-80wt% of one or more among rare earth elements including Y and the balance essentially Fe and/or Co, which is crushed and regulated. Thus-obtained powder is charged into the mold for compacting, which is subjected to compacting and sintering at a temp. ranging from the liquidus temp. of the above alloy to +50 deg.C, at a pressure of >=500kgG/cm<2> and under the condition where the above powder of rare-earth alloy is allowed to exist in a practically inert or vacuum atmosphere. In this way, the high- density sintered compact of rare-earth alloy for targets suitable for sputtering operation can be obtained in a short time without causing the occurrence of cracks, breakage, etc., nor causing any problem in handling. |
