| 摘要 |
An apparatus for mass spectroscopy on ions formed when sample components carried on a target (6) are bombarded with a primary beam (4). It is desired to reduce the generation of ions and neutral particles as much as possible from the portions other than the sample components (A to D) on the target (6). To solve this assignment, the bombardment against the target (6) with the primary beam (4) is interrupted when the portions among the sample components (A to D) on the target (6) pass over the position of the bombardment with the primary beam. |
