| 摘要 |
PURPOSE:To obtain a very stable electrophotographic sensitive body having a long life by controlling the internal stress in a photoconductive layer. CONSTITUTION:An electrophotographic sensitive body is composed essentially of a support and an amorphous silicon-base photoconductive layer formed on the support, and the internal stress in the photoconductive layer is controlled so that the stress is compressive stress on at least the support side. For example, when a single layer type photoconductive layer 11 contg. oxygen is formed on an Al drum substrate 2, the temp. of the substrate is set at 200 deg.C at the beginning of formation and is slowly lowered to 193 deg.C at the end of formation. Oxygen is added at a flow rate satisfying NO/SiH4=0.07 and B2H6 is used by an amount (ppm) satisfying B2H6/SiH4=100 so as to introduce B as an impurity for controlling valence electron. The resulting electrophotographic sensitive body does not cause the stripping of the photoconductive layer even when the service temp. is changed, satisfactory results are produced by the valuation of an image after attachment to a copying machine, and the sensitive body has such printing resistance that >=500,000 copies can be formed and ensures a long life. |
