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发明名称
FORMING METHOD OF RESIN PATTERN
摘要
申请公布号
JPS6255934(A)
申请公布日期
1987.03.11
申请号
JP19850196335
申请日期
1985.09.05
申请人
MATSUSHITA ELECTRONICS CORP
发明人
TAKASU YASUHIRO
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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