发明名称 Thermocouple vacuum gauge.
摘要 <p>A thermocouple pressure gauging system for measuring partial vacuum is provided which uses AC current to heat the thermocouple to constant temperature. A signal proportional to pressure is derived from the AC current needed to heat to constant temperature.</p>
申请公布号 EP0213757(A2) 申请公布日期 1987.03.11
申请号 EP19860305911 申请日期 1986.07.31
申请人 VARIAN ASSOCIATES, INC. 发明人 SCHOLL, RICHARD A.
分类号 G01L21/14 主分类号 G01L21/14
代理机构 代理人
主权项
地址