发明名称 MULTILAYER WIRING SUBSTRATE
摘要 A multilayer wiring substrate is described wherein a plurality of power supply wiring layers for supplying different voltages is arranged in a first group and interlayered with insulation layers and an additional plurality of power supply wiring layers arranged in a second group, each for providing the same voltage as a layer in the first group, is disposed within the same substrate and interlayered with insulation layers. Corresponding wiring layers of the first and second group are interconnected with via-hole wirings. A signal wiring section is disposed on the power supply wiring section. Polyimide layers of insulation separate the wiring layers of the signal wiring section and via-hole wirings include a mixture of gold and polyimide.
申请公布号 EP0176245(A3) 申请公布日期 1987.03.11
申请号 EP19850306020 申请日期 1985.08.23
申请人 NEC CORPORATION 发明人 INOUE, TATSUO
分类号 H05K3/46;H01L23/538;(IPC1-7):H01L23/52 主分类号 H05K3/46
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