摘要 |
A multilayer wiring substrate is described wherein a plurality of power supply wiring layers for supplying different voltages is arranged in a first group and interlayered with insulation layers and an additional plurality of power supply wiring layers arranged in a second group, each for providing the same voltage as a layer in the first group, is disposed within the same substrate and interlayered with insulation layers. Corresponding wiring layers of the first and second group are interconnected with via-hole wirings. A signal wiring section is disposed on the power supply wiring section. Polyimide layers of insulation separate the wiring layers of the signal wiring section and via-hole wirings include a mixture of gold and polyimide. |