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经营范围
发明名称
Continuous vapour phase processing machine.
摘要
申请公布号
EP0213951(A2)
申请公布日期
1987.03.11
申请号
EP19860306728
申请日期
1986.09.01
申请人
EMHART INC.
发明人
STRATTMAN, WAYNE P.
分类号
B01J19/00;B23K1/015;C23G5/04;H01L21/302;H01L21/3065
主分类号
B01J19/00
代理机构
代理人
主权项
地址
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