| 摘要 |
PURPOSE:To accurately transfer a chip by arbitrarily setting the moving distance and pressing a load of a suction tool by a linear motor on upper and lower linearly moving shafts, and controlling the moving position of a transfer motor to apply a proper lateral force to the chip arbitrary times. CONSTITUTION:A tool 6 is set to a height P0 by a linear motor L, and transferred to a position A by a motor 19. When a chip 2a is completely positioned at T0, the L is operated to lower to a height P1 (at T1), is finely moved to lower to a height P2. The chip is attracted at T4, and raised to the P0 at T5. The motor 19 transfers the tool to a position B at T6, and starts setting next chip 2b. When the tool 6 is lowered to P3 at T7, a signal S separates a position loop from a speed loop at T8, the motor L is controlled at the speed from the P3 according to a load deviation signal alpha, is switched to a current control at P4 to monitor a current feedback signal, a predetermined load is applied to the chip 2a, and the motor 19 applies a lateral vibration thereto. The tool is returned to the P0 at T10, and the motor 19 is returned to the position A to the next cycle. |
