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发明名称
PHOTOLUMINESCENCE METHOD OF TESTING DOUBLE HETEROSTRUCTURE WAFERS
摘要
申请公布号
EP0119225(B1)
申请公布日期
1987.03.11
申请号
EP19830902858
申请日期
1983.08.17
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
BESOMI, PAUL, RAYMOND;DEGANI, JOSHUA;WILT, DANIEL, PAUL
分类号
G01N21/64;G01R31/26;G01R31/308;H01L21/66;H01S5/00;(IPC1-7):G01R31/26
主分类号
G01N21/64
代理机构
代理人
主权项
地址
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