| 摘要 |
PURPOSE:To decrease the loss of a laser beam by respectively laminating non- reflection coating layers on the front and rear surfaces of a glass substrate and further etching patterns such as characters and figures onto the non- reflection coating layers. CONSTITUTION:The non-reflection coating layers 2, 3 are formed of magnesium fluoride, etc. on both the front and rear surfaces of the glass substrate 1. A chromium layer 4 as a lattice matching layer and a gold layer 5 as a reflection layer or an aluminum layer 4 as the reflection layer and an aluminum oxide layer 5 as a protective layer are laminated on such coating layer 3. More specifically, a mask reflection layer 6 is formed of the chromium layer 4 and the gold layer 5, etc. The patterns 7 of the characters, figures. etc. are formed on the front surface of the mask reflection layer 6 by photoetching, etc. The loss of the laser beam to the mask substrate is decreased with the coating layer 6 by the above-mentioned method. |
