Illumination apparatus for testing photoelectric transducer device

摘要

An illumination apparatus for testing photoelectric devices such as solid-state image sensors is capable of easily switching between sufficient uniform illumination and high-luminance spot illumination at high speed, and of performing various types of measurements by switching on/off various types of optical elements. The illumination apparatus has a main optical system for uniformly illuminating a test chart which is projected on a solid-state image sensor and an auxiliary optical system for supplying auxiliary light rays to the main optical system so as to achieve high-luminance spot illumination. The auxiliary optical system is detachably mounted with respect to the main optical system.