| 摘要 |
PURPOSE:To elevate detection accuracy and analysis reliability of elements contained by a method wherein the intensity of characteristic X rays of a sample is measured to identify an element with the highest peak in the wavelength profile and then, the minimum excitation voltage thereof is always compared with acceleration voltage of EPMA. CONSTITUTION:A sample is point analyzed with an EPMA1 and the wavelength profile of released characteristic X rays is inputted into a central control section 6 of a qualitative analyzer 2 to identify an element A indicating the highest peak PA1 in the profile detected by a detector section 12. Regarding the element A, the minimum excitation voltage EA is compared with acceleration voltage V0 of the EPMA1 by a comparator section 16 and when EA<V0, the analysis of elements is repeated sequentially. Therefore, since the minimum excitation voltage of the element is always compared with acceleration voltage of the EPMA, there is no identification of element originally non-existing to prevent misrecognition of peak thereby elevating the detection accuracy and analysis reliability of elements. |
