发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To enable a voltage of the same magnitude to be applied to a tunnel oxide film using the same high-voltage pulse by causing an overlapping portion to exist between the word line for selecting the MOS-type memory transistor and the floating gate of the MOS-type memory transistor. CONSTITUTION:A floating gate 1 extends under a word line 4, and a overlapping portion 12 exists between the floating gate 1 and the word line 4. By this, a capacitance CWL is newly formed between the word line 4 and the floating gate 1. Such a structure can be made without etching the floating gate 1 with self-alignment of a control gate 2 except the portion wherein the floating gate 1 forms a memory transistor 8. With this, a voltage of the same magnitude can be applied to the first insulating film using the same high-voltage pulse, at the time of injecting electrons into the floating gate and of removing electrons from the floating gate.
申请公布号 JPS6254472(A) 申请公布日期 1987.03.10
申请号 JP19850194355 申请日期 1985.09.02
申请人 MITSUBISHI ELECTRIC CORP 发明人 TERADA YASUSHI;NAKAYAMA TAKESHI;KOBAYASHI KAZUO
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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