| 摘要 |
PURPOSE:To reinforce pre-ionization and thus to stabilize discharges by a method wherein a capacitor is connected in parallel between a cathode, one of main electrodes performing discharge, and trigger electrodes; on the other hand, an inductance is connected in parallel between an anode and the trigger electrode. CONSTITUTION:The mesh cathode 10 and the anode 3 opposed thereto are arranged in a laser tube 1. Many trigger electrodes 11 having insulation layers are arranged in the back of the cathode 10, and the cathode 10 and the anode 3 are connected to a pulse power source 4. Further, the capacitor 12 is connected in parallel between the trigger electrodes 11 and the cathode 10, and a stabilizing coil 13 is connected in parallel between the trigger electrodes 11 and the anode 3. The trigger electrodes 11 are successively coated with organic substance 15 and inorganic substance 16 which serve as the insulation layer around a conductor 14. Thereby, the equivalent capacitance between the cathode 10 and the trigger electrodes 11 increases, and the pre-ionization generating therebetween becomes strong, resulting in the promotion of the stabilization of main discharges. |
