| 摘要 |
PURPOSE:To shift multidirectionally an objective-lens supporter cylinder without causing it to incline by using cylindrical coils and flat coils provided on the peripheral surface of an outer cylinder. CONSTITUTION:The objective lens 1 supported by the objective-lens supporter cylinder 3 is driven in Z-direction by the electro-magnetic force generated by a focus adjusting coil 28 provided around the outer peripheral part 5a of the outer cylinder 5 because said cylinder 3 is supported by an intermediate body 10 freely slidablly. The flange part 10a of the body 10 energized downward by a damper 18 contacts the projection part 16d of a magnetic body 16 while the body 10 is supported slidablly on the plane X-Y, and therefore, the objective lens 1 is driven in the directions of X and Y by the electro-magnetic force generated by tacking adjusting coils 38a and 38b, and tangential adjusting coils 38c and 38d which are the flat coils provided on the outer peripheral surface 5a of the outer cylinder 5. In such way, the objective lens 1 is smoothly driven in three dimensions of axes X, Y, and Z without being inclined. |
