| 摘要 |
PURPOSE:To measure the temperature of a substrate with high accuracy and to control it by heating the substrate with infrared rays of <=5mum in wavelength and controlling the surface temperature by a thermometer which senses infrared rays of >=6mum emitted by the substrate. CONSTITUTION:The substrate 3 is heated by an infrared-ray lamp 23 of <=5mum in wavelength, e.g. halogen lamp and infrared rays of <=6mum among infrared rays radiated by the substrate 3 are sensed by the infrared-ray thermometer 25 to measure the substrate temperature. Then, the detected temperature is inputted to a controller 27 to control the electric power of a power source 28. Thus, the wavelengths for the heating and radiation are distinguished, so the surface temperature of the substrate is measured with high accuracy and a film of high quality is formed on the substrate. |
