| 摘要 |
PURPOSE:To obtain a biosensor having high sensitivity and high reliability by fixing either protein or enzyme by prescribed bonds onto a gate electrode of an FET via a thin hydrophilic photosensitive film pattern consisting of a prescribed main material, thereby securely and selectively fixing the protein or enzyme without losing the activity thereof to the electrode. CONSTITUTION:A water soluble photosensitive material (an aq. soln. of pullular and ammonium dichromate) is coated on the substrate 2 on which the FET is preliminarily formed to form the thin hydrophilic photosensitive film 3. The film is then exposed 8 by using a photomask 5 opened only in the part corresponding to the gate electrode 4 and is developed, by which the thin hydrophilic photosensitive film pattern 6 is formed. The pattern 6 is essentially made of a material contg. a hydroxyl group or carboxyl group. The substrate is then immersed in an aq. periodic acid soln. to oxidize the OH group on the surface to an aldehyde. The protein and enzyme having the specific activity are brought into addition reaction via the bonds of chemical formulas I-III and are fixed as a thin enzyme film 7. The substrate 1 is subjected to dicing and assemblying of electrodes, by which the biosensor is completed. |
