| 摘要 |
PURPOSE:To simplify the structure of a cathode, to decrease man-hours in manufacturing the title device and in maintenance and inspection and to reduce the capacity of a gas circulating blower, by providing a plurality of auxiliary discharge electrodes between the cathode and an anode on a plane, which intersects the flow of laser gas at a right angle. CONSTITUTION:A cathode 10 is arranged at the upstream side of the flow of laser gas P. An anode 13 is arranged at the downstream side. A DC voltage is applied across both electrodes 10 and 13, and glow discharge is generated in the same direction as the flow of the laser gas P. The laser beam output C is taken out with the excitation of the laser gas and the resonation of an optical resonator. A plurality of auxiliary discharge electrodes 15 are provided between the cathode 10 and the anode 13 on a plane, which intersect the flow of the laser gas P at a right angle. The electrodes 15 generate auxiliary discharge in the direction crossing the flow of the laser gas P between the cathode 10 and the anode 13. A plate body 12 provided with a plurality of projections 12a is provided at the side part of the cathode 10 or the anode 13 facing the auxiliary discharge electrodes generating the auxiliary discharge. |
