| 摘要 |
PURPOSE:To manufacture a thin film sample piece for electron microscipic observation rapidly and easily by preparing an elementary piece by cutting a ceramic sample to a prescribed thickness, polishing the one surface with diamond paste, polishing mechanically and ionizedly another surface to concaved surface state. CONSTITUTION:A rod-shaped piece of about 4X4mm. is cut from the ceramic sample A by using diamond slicer, further the sample B is cut to 200mum thickness by using high speed cutter to obtain the elementary piece C. One surface of the piece C is polished by diamond polishing disc, and subjected finally to the finishing polishing by using 1mum diamond paste to obtain a sample piece 7. Next, the polished and finished surface of the piece 7 is adhered at the end surface of a supporting rod 5 with adhesive, and the unpolished surface is polished mechanically to concaved lense state by rotating motors 1, 2. If a hole is opened at the center part of the piece 7, said piece 7 is exfoliated and fihished finally by ion polisher. |
