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发明名称
摘要
申请公布号
DE2743856(C2)
申请公布日期
1987.03.05
申请号
DE19772743856
申请日期
1977.09.29
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN, DE
发明人
RUCHA, ULRICH;BAROWSKI, GERHARD, 8000 MUENCHEN, DE
分类号
H01L21/205;C23C16/52;C30B25/16;H01L21/31;(IPC1-7):C30B25/08
主分类号
H01L21/205
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