Monocrystalline semiconductor superlattice structures.

摘要

A semiconductor superlattice (1) is provided with a one-dimensional carrier path (a) at the intersection of low energy level layers (5, 7) of the superlattice. A group of layers in a first crystallographic direction (Y) comprises a low energy level layer (5) bounded by two higher energy level layers (4, 6). A series of layers in a second crystallographic direction (2) different from the first comprises a lower energy level layer (7) immediately adjacent the layers of the group of layers (4, 5, 6). The lower energy layer is bounded by a higher energy level layer (8). The low and higher energy level layers can be formed of Ga1-xAlxAs where x is larger for higher energy level layers. The lower energy level layer can be formed from GaAs of 10nm thickness. Conductivity modulation through an adjacent exposed surface (11) can then be employed for controlling electron and hole movement in the path to define a quantum pipeline carrier path. Control and contacting electrodes may be positioned on the exposed surfaces.