Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure.

摘要

A process for manufacturing a mask for use in x-ray photolithography begins with a step of providing a glass disk (50) which is coated with a layer of boron nitride (52). The glass disk is about ¼ of an inch thick and about 4.5 to 6 inches in diameter. A circular portion (50a) of the boron nitride layer on one side of the glass disk is removed thus exposing a circular portion of the glass disk. The exposed portion of the glass disk is then removed, leaving a glass ring coated with a boron nitride membrane on one side. A layer of polyimide (54) and a layer of x-ray opaque substance (58) is deposited on the boron nitride membrane. The x-ray opaque que substance is then patterned, the resulting structure being a mask which is used in x-ray photolithography.