SUBSTRATE SUPPORT STRUCTURE,申请号GB19870002093-传众专利搜索

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发明名称	SUBSTRATE SUPPORT STRUCTURE
摘要
申请公布号	GB8702093(D0)	申请公布日期	1987.03.04
申请号	GB19870002093	申请日期	1987.01.30
申请人	MITSUBISHI DENKI KK	发明人
分类号	H01L21/265;H01J37/317;(IPC1-7):H01J37/20	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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