ETCHING METHOD FOR INSULATING FILM,申请号JP19860195464-传众专利搜索

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发明名称	ETCHING METHOD FOR INSULATING FILM
摘要
申请公布号	JPS6352413(A)	申请公布日期	1988.03.05
申请号	JP19860195464	申请日期	1986.08.22
申请人	HITACHI MICRO COMPUT ENG LTD;HITACHI LTD	发明人	KAWAMURA KOICHIRO;HIROBE YOSHIMICHI;NOJIRI KAZUO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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