Micro replication process.

摘要

A method of replicating a master pattern comprising coating the master pattern with a layer of a radiation curable composition comprising as the radiation curable component, a compound having the structure <CHEM> wherein R represents a cycloaliphatic or an aromatic group; R1 represents -(CH2)-n; CH2CH2OCH2CH2- or <CHEM> R2 represents hydrogen or methyl; n is 2 to 10; p is 3 or 4; and exposing the layer to actinic radiation thereby forming a negative image of the master pattern in the layer.