| 摘要 |
PURPOSE:To obtain an extinction ratio and branching ratio stable with an atm. temp. fluctuation by providing a control electrode for guided light on a buffer layer, providing a photovoltanic film on a sapphire substrate and electrically coupling the photovoltanic film and the control electrode. CONSTITUTION:The sapphire c-plane substrate is used for the transparent substrate 11 and a thin PLZT film 12 is provided by, for example, sputtering vapor deposition, onto said substrate. The 1st thin band 13 is formed of a tantalum oxide film thereon by a lift-off method used for semiconductor lithography, then the 2nd thin band 14 is likewise formed by the lift-off method at 2 deg. angle of intersection theta; in succession of, a buffer layer is constituted of an aluminum- added tantalum oxide film. The control electrode is constituted of vapor- deposited aluminum at 4mum electrode gap space. The photovoltanic film 19, for example, GaAs photoelectromotive cell consisting of p-n series connection is adhered onto the substrate and is electrically coupled to the control electroce 18 by an Al wiring pattern to constitute the optical switch. |
