| 摘要 |
PURPOSE:To increase an S/N ratio by forming entirely a transparent conductive film through a transparent insulating film. CONSTITUTION:A light from a light source is emitted to an original surface, reflected lights are condensed by a lens, emitted through a protective film 27, a transparent conductive film 26 and a transparent insulating film 25 to a photoelectric conversion film 24, in which a light signal is converted to an electric signal. Thus, the electric signal converted by the film 24 is detected by a driving element 23. In this case, the film 24 by an a-Si:H thin film is generally high impedance to produce a small output, but since the element 23 is disposed near on the same substrate 20, the output signal when the film 24 receives the light signal is immediately impedance-converted. Thus, an S/N ratio is increased. |
