FORMING DEVICE FOR DEPOSITED FILM,申请号JP19880038728-传众专利搜索

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发明名称	FORMING DEVICE FOR DEPOSITED FILM
摘要
申请公布号	JPS64731(A)	申请公布日期	1989.01.05
申请号	JP19880038728	申请日期	1988.02.23
申请人	CANON INC	发明人	KANAI MASAHIRO
分类号	H01L21/205;H01L31/0248;H01L31/08	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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