| 摘要 |
PURPOSE:To efficiently and economically carry out CVD by providing the inlet and outlet of a gas to a fixed part obliquely in the vicinity of a laser light irradiating port and furnishing a reaction chamber housing a sample is the outer case of a movable part. CONSTITUTION:Laser light 8 is irradiated from a laser emitting port 3 through a transparent shield plate 6 on an irradiation port 7 of a fixed part 11, a gas inlet and a gas outlet 4 and 5 are provided in the vicinity of the irradiation port 7 and a gaseous reactant is obliquely introduced and obliquely discharged. A holder 9 for holding a sample 1 is arranged in the outer case 10 of a movable part 12 which is movable against the fixed part 11 to form a reaction chamber 2 and laser CVD is applied to the sample 1. By such a structure, the gaseous reactant is smoothly circulated, the density of the gas in the vicinity of a working point is easily increased and laser working is efficiently carried out. |
