发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the generation of deterioration effect of light in the condition of practical use by a method wherein the effect of SEL (state excited by light) is positively utilized. CONSTITUTION:A non-single crystal semiconductor, containing a hydrogen or halogen element, is formed on a substrate, said semiconductor is maintained in a depressed state, and an optical annealing is performed, and when an alkaline metal element is added in the semiconductor or on its surface as an adding material, the so-called SEL effect wherein current conductivity is gradually lowered can be observed. To be more precise, the unpaired hand generated by the irradiation of light is sufficiently grown in the non-single crystal semiconductor by the effect of SEL, and it is neutralized and stabilized. As a result, even when light irradiation is conducted under the practical use, an unpaired hand is grown by the above-mentioned irradiation, and the generation of Stabler- Wronskii effect, which is observed by an increase of the recombination center, can be prevented.
申请公布号 JPS6246514(A) 申请公布日期 1987.02.28
申请号 JP19850186204 申请日期 1985.08.24
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L31/04;C23C16/48;H01L21/205;H01L21/322;H01L21/324 主分类号 H01L31/04
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