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经营范围
发明名称
WAFER PROCESSOR
摘要
申请公布号
JPS6246828(A)
申请公布日期
1987.02.28
申请号
JP19850183964
申请日期
1985.08.23
申请人
CANON INC
发明人
SATO TERUYA;HIRAGA RYOZO;SEKI MITSUAKI
分类号
H01L21/677;B25J15/06;B65G49/07;B65H3/08;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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