LIGHT QUANTITY CORRECTING UNIT OF PHOTO-CVD DEVICE BY BIREFRINGENCE CONTROL,申请号JP19850187607-传众专利搜索

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发明名称	LIGHT QUANTITY CORRECTING UNIT OF PHOTO-CVD DEVICE BY BIREFRINGENCE CONTROL
摘要
申请公布号	JPS6247117(A)	申请公布日期	1987.02.28
申请号	JP19850187607	申请日期	1985.08.27
申请人	NEC CORP	发明人	HAGA AKIRA
分类号	H01L21/205;H01L21/263;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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