| 摘要 |
PURPOSE:To perform the scanning of a beam spot at high speed with high accuracy by providing a pair of cylindrical lens on the scanning device and by constituting to condense the laser beam in a spot shape at the intersecting point of said lens by a beam expander. CONSTITUTION:The scanning device equips with each driving device 2, 4 to advance, retreat and drive cylindrical lenses 1, 3 in the X axial and Y axial directions respectively. The irradiating part 5 is to condense the emitted laser beam 8 in spot like shape after its passing through the lenses 1, 3 at the intersecting point of the lenses 1, 3 by a beam expander 7. A laser beam spot 12 is scanned two-dimensionally in the X axial or Y axial direction on a tip 11 when one part or both parts of the lenses 1, 3 is moved in this state. The two dimensional scanning of the laser beam spot can thus be made at high speed and with high accuracy. |
