发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To protect resistance element from breakdown caused by curernt concentration and improve reliability of an IC by connecting a plurality of the straight resistance elements with conductive layers composed of different material from the resistance material. CONSTITUTION:A field insulating film 2 is provided on a P<-> type semiconductor substrate 1 and an N-channel type MISFET 4, an N-channel tpe clamping MISFET 5, resistance elements 6 and a bonding pad 7 are formed on it. Conductive layers 8 are connected to them through contact holes 9. The resistance element 6 are composed of polycrystalline silicon layers and arranged linearly and connected in series with conductive layers 8E. Therefore, curved parts are eliminated from individual resistance elements 6 and current concentration can be avoided so that the breakdown of the resistance elements can be avoided and the reliability of the IC can be improved.
申请公布号 JPS6245161(A) 申请公布日期 1987.02.27
申请号 JP19850184138 申请日期 1985.08.23
申请人 HITACHI LTD 发明人 YAMAMOTO YUKIO;FURUKI AKIRA
分类号 H01L27/04;H01L21/822;H01L27/02 主分类号 H01L27/04
代理机构 代理人
主权项
地址