| 摘要 |
PURPOSE:To prevent a rubber vibration insulator for holding the resonator from being deteriorated by ozone produced during laser oscillation in a laser oscillator, by utilizing a material having ozone resistance for the rubber vibration insulator. CONSTITUTION:A resonator is composed of invar bars 5 and of optical system attaching structures 6 attached thereto. The resonator is supported on resonator support 9 through rubber vibration insulators 7. The rubber vibration insulator 7 is made of a material having excellent ozone resistance, for example of chloroprene rubber or ethylene propylene rubber. |
