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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01318225(A)
申请公布日期
1989.12.22
申请号
JP19880150187
申请日期
1988.06.20
申请人
FUJITSU LTD
发明人
GOTO HIROSHI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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