发明名称 PELLET MOUNTING METHOD
摘要 <p>PURPOSE:To improve the wetting extension of bonding, and to mount a pellet properly by applying ultrasonic vibrations on the mounting of the pellet. CONSTITUTION:A pellet 6 is sucked under a vacuum by a collet 5, and the pellet 6 is pushed against an adhesive layer 4 by the collet 5 and the pellet 6 is mounted. Vertical ultrasonic vibrations are applied or lateral ultrasions are applied to a tab 1 or ultrasonic vibrations are applied to the collet 5 at that time, and ultrasonic energy is transmitted over adhesives 3. Consequently, the wetting extension of adhesives 3 is improved by ultrasonic energy. Accordingly, the pellet is mounted properly.</p>
申请公布号 JPS6245133(A) 申请公布日期 1987.02.27
申请号 JP19850184126 申请日期 1985.08.23
申请人 HITACHI LTD 发明人 ICHITANI MASAHIRO
分类号 H01L21/52;H01L21/58 主分类号 H01L21/52
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