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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6245068(A)
申请公布日期
1987.02.27
申请号
JP19850183947
申请日期
1985.08.23
申请人
HITACHI LTD
发明人
YAMAMOTO NAOKI;HAYASHIDA TETSUYA;SATO AKIRA
分类号
H01L29/78;H01L21/265;H01L21/266
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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