发明名称 PATTERN EXPOSING DEVICE
摘要 PURPOSE:To obtain a device which eliminates the need to store a wiring pattern mask and suits to various kinds of small - medium quantity production without spoiling productivity by providing a computer which reads stored graphic data and controls the pattern of a variable pattern mask. CONSTITUTION:A light source 1 for exposure, the variable pattern mask 3 where numbers of liquid crystal picture elements are arrayed on a two-dimensional plane, and a body to be exposed are arranged on the same optical path, and this exposing device consists of a liquid crystal control circuit 11 which controls the liquid crystal of the pattern mask for each picture element, a storage device 14 which is stored with graphic data on a wiring pattern to which a printed board is exposed, and the computer 13 for control which reads graphic data out of the storage device 14 and sends wiring pattern information necessary for the 1st exposure to the liquid crystal control circuit 11. Consequently, various kinds of wiring pattern masks need not be formed and stored at an actual article, and stored in the form of the graphic data in the storage device 14 and read out selectively by the control computer 13 in a short time when necessary, thereby producing a small quantity of various kinds of printed boards efficiently.
申请公布号 JPS6244718(A) 申请公布日期 1987.02.26
申请号 JP19850185212 申请日期 1985.08.23
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TAKANO HIROTSUGU
分类号 H01L21/30;B23K26/06;G02F1/13;G02F1/133;G03F1/54;G03F7/20;G09G3/36;H01L21/027 主分类号 H01L21/30
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