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发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPH02205318(A)
申请公布日期
1990.08.15
申请号
JP19890026356
申请日期
1989.02.03
申请人
FUJITSU LTD
发明人
TOYOFUKU TAKESHI;KIKUCHI MASAYUKI;KURAMOCHI TOSHIYUKI;NODA SATOSHI;MIURA KAZUTAKA
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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