| 摘要 |
PURPOSE:To prevent foreign matter from sticking during mounting and to facilitate simultaneous mounting on both surfaces by performing the operation while a mask substrate and the mask protective film are stood vertically. CONSTITUTION:The mask substrate 1 and mask protective film 2 are held on respective support tables 11 and 12. Then, the support table 12 for the mask protective film 2 is moved along a guide key 13 and when the mask protective film 2 nearly contacts the mask substrate 1, the position of the mask protective film 2 on the mask substrate 1 is adjusted with adjusting screws 17 and 18 and the support table 12 is pressed against the support table 11 with a fixing screw 6, thus fixing the mask protective film to the mask substrate. Consequently, the sticking of foreign matter in mounting is reduced and both-surface simultaneous mounting is made possible by holding them vertically. |
