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发明名称
SETTING DEVICE FOR ELECTRONIC PARTS
摘要
申请公布号
JPS6244669(A)
申请公布日期
1987.02.26
申请号
JP19850184174
申请日期
1985.08.23
申请人
HITACHI LTD
发明人
AJIKI NAOJI
分类号
H01L21/68;G01R31/00;H05K3/30;H05K13/04
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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