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发明名称
APPARATUS FOR TREATMENT BY ELECTRIC DISCHARGE REACTION WITH PLURAL ELECTRODES
摘要
申请公布号
JPS6244576(A)
申请公布日期
1987.02.26
申请号
JP19840193124
申请日期
1984.09.14
申请人
ANELVA CORP
发明人
KIN KIYOUSHIYOKU
分类号
C23C14/34;C23C16/50;C23C16/52;C23F4/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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