WAVEGUIDE FOR CARBON DIOXIDE LASER LIGHT

摘要

PURPOSE:To prevent temperature from rising locally and transmission loss from increasing, and to protect an internal wall and improve reliability and safety for a long period by providing a holder which holds a lens at both dies of a metallic hollow waveguide which has an external cooling means and providing an intake and an outlet nozzle and a detour hole for dry gas to the entrance-side and exit-side holders. CONSTITUTION:A cooling medium is flowed through a pipe 2 surrounding the outer periphery of the metallic hollow waveguide 1 spirally to cool the waveguide. The dry gas which flows in an intake 8 provided behind a condenser lens 6 held by the entrance-side holder 3 passes through the waveguide 1 and the detour hole 10 surrounding a lens 7 held by the exit-side holder 4 to flow out of a nozzle 9 at the tip. Water is therefore prevented from sticking on the internal wall of the waveguide 1 and dust is also prevented from entering the waveguide 1 and sticking on the lenses 6 and 7.