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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPS6243135(A)
申请公布日期
1987.02.25
申请号
JP19850184407
申请日期
1985.08.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITAKURA HIDEAKI
分类号
H01L21/205;H01L21/302;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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