发明名称 STROBE ELECTRON BEAM DEVICE
摘要 PURPOSE:To enable high-speed scanning free from phase shift by dividing the frequency of a high frequency clock by a first and a second frequency-dividing circuit and varying the frequencies of two clock signals supplied to an IC driver and a strobe SEM. CONSTITUTION:A high frequency clock 101 from a high-frequency-basic-clock- generating circuit 1 is supplied to a first frequency-dividing circuit 2 for dividing in M portions and a second frequency-dividing circuit 3 for dividing in (M+L) portions and the outputs of the circuits 2 and 3 are delivered to an IC driver 5 and a strobe-SEM-controlling circuit 11. The phase of the basic clock applied to the strobe-SEM-controlling circuit 11 is adjusted to be slightly ahead of the phase of a clock applied to an IC driver 5 for each period. The phase shift caused during performing frequency scanning is prevented by synchronously producing the clock signal. Due to the above structure, it is possible to measure the waveform of the IC internal signal with high resolution by achieving high speed without using any delay line.
申请公布号 JPS6243053(A) 申请公布日期 1987.02.25
申请号 JP19850182310 申请日期 1985.08.20
申请人 FUJITSU LTD 发明人 OKUBO KAZUO;OZAKI KAZUYUKI;ITO AKIO;GOTO YOSHIAKI;ISHIZUKA TOSHIHIRO
分类号 G01R31/302;H01J37/28;H01L21/66 主分类号 G01R31/302
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