| 摘要 |
<p>PURPOSE:To easily and surely make waste gas harmless and to prevent the desorption of gases by bringing the waste gas contg. fluorine components and chlorine components into contact with the MgO having 100-200m<2>/g specific surface. CONSTITUTION:Waste gas contg. fluorine components and chlorine components such as HF, SiF4, BCl3, HCl and SiCl4 is brought into contact with the MgO having 100-200m<2>/g specific surface by means of a fixed bed, a moving bed, a fluidized bed, etc. The mean grain diameter of the MgO is preferably regulated to about 5-10mm. The waste gas after contact with the MgO is made harmless and the gases are not desorbed.</p> |
