| 摘要 |
PURPOSE:To attain a substrate with small optical anisotropy, low defect, high accuracy and low cost by injecting an optical setting resin to the entire major space and a part of a resin pool while an injection nozzle is moved in the main space in its axial center direction and curing the resin by the irradiation of energy. CONSTITUTION:A space 11a is formed between a flat plate 7a and a stamper 9a, the space 11a is split into a main space 14a and a resin pool space 15a by a notch ring 13a, and a die 14a' is formed in the main space 14a. When the upper face of the injection nozzle 16a is coincident with the upper face of the stamper 9a, the injection nozzle 16a is moved upward to inject the 1st optical setting resin 17a from the supply source into the die 14a', the resin is filled up and passes through a minute gap 12a between the notch ring 13a and the flat plate 7a, is injected in the resin pool space 15a by nearly a half and the injection is finished when the resin is in contact with a mask 8a. Then an energy ray from a light source 18a is irradiated via the flat plate 7a to cure respectively the 1st optical setting resins 17a, 17a'. |
