| 摘要 |
Chalcogenide suboxide, particularly tellurium oxides TeOx, are possible to reversibly change optical characteristics by changing power of irradiating light to repeat recording and erasure. If the TeOx is x<1, high sensitivity is obtained but the characteristic of film is greatly deteriorated due to the environment. In accordance with this invention there is proposed a film which can be used as an optical recording medium having a high sensitivity and a high stability under the conditions that a partial pressure of oxygen is in the range from 1x10-4-9x10-3 Torr and a high frequency power for forming a plasma in the range of 50-500 W and wherein the TeOx film is formed by metal tellurium vapor passing through a plasma of oxygen gas.
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