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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6242525(A)
申请公布日期
1987.02.24
申请号
JP19850182235
申请日期
1985.08.20
申请人
FUJITSU LTD
发明人
KATO TAKASHI;MUTO MASAAKI;ITO TAKASHI
分类号
H01L21/28;H01L21/285
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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